4011546

The 4011546 is a scorpION3™ high performance Air Ionization Bar specifically designed to exceed the most demanding application requirements in the semiconductor industry. The new ScorpION3™ product is designed to meet the unique requirements of Equipment Front End Modules (EFEM) for 200 and 300mm wafer process tools while seamlessly integrating ionizer functionality through the tool's user interface. Traditional pulse DC ionizer intermittently cycle positive and negative ions into the surrounding environment. Simco's patented peak reduction technology allows user to select a percentage of overlap (supply on time) during the bi-polar pulse cycle. Peak reduction effectively eliminates off time between bi-polar cycles resulting in faster discharge times at reduced levels of offset voltage. The result is a more ion-saturated environment with improved performance. Use of peak reduction technology provides the ability to achieve even more stringent ESD specification.

• Peak reduction technology - Provides superior offset voltage performance over competing system
• Total tool integration capability - Seamlessly integrate operations with process tool
• Bi-directional, dual access IR controller - Local calibration & management of operating parameters
• Available with CVD SiC emitters
• Address control - Independently digitally set to unique addresses
• Continuous communication, control and monitoring
• System monitoring and data logging

Applications

Safety