SFC6000D-5SLM

SFC6000D-5SLM is a mass flow controller for gases. It offers great performance in terms of repeatability, accuracy, control range and speed. Based on the thermal-mass measurement principle and using our proven CMOSens® MEMS technology, Sensirion builds radical mass flow controllers with best-in-class performance and speed, which, unlike most other devices on the market, do not drift and do not require in-service re-calibration. Typical application includes semiconductor: front opening unified pods (FOUP), glass coating and treatment, analytical instruments: gas chromatography, bioreactors, medical equipment: anesthesia, ventilation, heart-lung machines, N2O therapy and industrial automation.

• Flow range from 5 slm - 10 sccm
• Supply voltage range from 22.8 - 25.2 VDC
• Small form factor and low weight
• High accuracy/repeatability (2% / 0.2% of set point)
• Wide control range (500:1)
• Ultra-fast settling time (100ms)
• RS485 and I2C digital interface
• Exchangeable 0.23inch push-in and downmount connectors
• Integrated design with very few electronic components
• NIST traceable calibration