SFC5500-200SLM

SFC5500-200SLM is a digital mass flow controller. It combines a high precision sensor element with state-of the-art signal processing on a single chip and thereby providing an accurately calibrated and temperature compensated signal. Due to the excellent long-term stability of CMOSens® chips, no recalibration is required. The SFC5500 offers ultra-fast settling time and high control range. SFC5500 is a factory calibrated for multiple gases and combine smart features such as gas recognition and self-test capability. Finally, they offer high flexibility regarding mechanical connectors, which can be exchanged with off-the-shelf components. The brilliant performance of SFC5500 product makes them the best choice for a wide range of applications, such as analytical instrumentation, coating/etching equipment, medical equipment, process automation.

• Flow range from 200 to 0.2slm
• Excellent accuracy and repeatability (0.8% / 0.2% of setpoint respectively)
• Very wide control and measurement range (
• G ¼″ flange compatible with a broad range of connectors: e.g. Swagelok, Legis, Festo
• Calibrated for multiple gases (Air, N2, O2, H2, He, CH4, N2O, AR, CO2)
• Digital interface with temperature-compensated output
• Ultra-fast settling time (<lt/>100ms)
• Pressure resistance up to 10 bar
• Mean time between failures (MTBF) 169 years
• No drift and no re-calibration required in the field